RESEARCH AREA
Design and Manufacturing of Vacuum Deposition Systems
- Thermal ALD / Plasma-enhanced ALD (Inductively coupled plasma, Hollow cathode plasma)
- Powder ALD / Ultraviolet ALD
- Aerosol deposition (AD)
Chiplet Encapsulation
- Thermal conductor
Low-temperature Solid Oxide Fuel Cell
- Thin-film SOFC
- Hydrocarbon-fueled SOFC / Alcohol-fueled SOFC
Electrostatic Thin-film Capacitor
Catalyst
- Oxygen reduction reaction
- Oxygen evolution reaction